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pro vyhledávání: '"Hikoyoshi Son"'
Autor:
Keishi Iwamoto, Ayumu Matsumoto, Hikoyoshi Son, Shinji Yae, Kyohei Furukawa, Makiho Eguchi, Yuki Shimada
Publikováno v:
RSC Advances. 10:253-259
Metal-assisted etching is a promising technique for microfabrication of semiconductors. In this method, porous silicon (Si) can be produced with a very simple procedure, and various nanostructures can be designed by changing the catalyst patterns. Th
Autor:
Ayumu, Matsumoto, Hikoyoshi, Son, Makiho, Eguchi, Keishi, Iwamoto, Yuki, Shimada, Kyohei, Furukawa, Shinji, Yae
Publikováno v:
RSC advances. 10(1)
Metal-assisted etching is a promising technique for microfabrication of semiconductors. In this method, porous silicon (Si) can be produced with a very simple procedure, and various nanostructures can be designed by changing the catalyst patterns. Th