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pro vyhledávání: '"Hidong Kwak"'
Autor:
Jangryul Park, Youngsun Choi, Soonyang Kwon, Youngjun Lee, Jiwoong Kim, Jae-joon Kim, Jihye Lee, Jeongho Ahn, Hidong Kwak, Yusin Yang, Taeyong Jo, Myungjun Lee, Kwangrak Kim
Publikováno v:
Light: Science & Applications, Vol 13, Iss 1, Pp 1-14 (2024)
Abstract As semiconductor devices shrink and their manufacturing processes advance, accurately measuring in-cell critical dimensions (CD) becomes increasingly crucial. Traditional test element group (TEG) measurements are becoming inadequate for repr
Externí odkaz:
https://doaj.org/article/a25a851f4dcc4fcc9fe3ebbc71b740a3
