Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Hidetoshi Shinozaki"'
Autor:
Tomonori Tanaka, Hidetoshi Shinozaki
Publikováno v:
2018 International Symposium on Semiconductor Manufacturing (ISSM).
In management of the FDC (Fault Detection and Classification) alarm threshold, sensor drift after maintenance has been big and major challenge. Especially in etching area where has relatively short maintenance (cleaning) cycle and many chambers and r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::30204754e2c8af1973d7fbcf4710959b
https://doi.org/10.1109/issm.2018.8651140
https://doi.org/10.1109/issm.2018.8651140
Autor:
Hidetoshi Shinozaki, Yoshiyuki Nakao
Publikováno v:
2018 International Symposium on Semiconductor Manufacturing (ISSM).
In case of specific equipment in fleet has a problem, we applied ANOVA (Analysis of Variance) of FDC (Fault Detection and Classification) statistics data to extract the problem related sensors. And using the statistics trend and link analysis with va
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::660960f41e1b8cb521475c0b79fb379f
https://doi.org/10.1109/issm.2018.8651172
https://doi.org/10.1109/issm.2018.8651172
Publikováno v:
Doboku Gakkai Ronbunshu. 1998:21-34
近年, 新しいトンネル構築工法としてプレライニング工法が注目されている. その工法の1つであるチェーンカッタを用いた切削即時充填式プレライニング工法は, 試験機による実験や試験
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::417abd746af29432b44a0ea7e1318238
https://doi.org/10.2208/jscej.1998.602_21
https://doi.org/10.2208/jscej.1998.602_21