Zobrazeno 1 - 10
of 266
pro vyhledávání: '"Hideo Sugai"'
Publikováno v:
Plasma Sources Science and Technology. 31:075010
This article introduces the effect of the probe temperature existing in a curling probe, which enables one to measure the electron density in plasma and the thickness of deposited film on the probe surface. We have recognized the effect appearing on
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9ddc1b3a14d10eb251b83337ede13ef5
https://doi.org/10.1088/1361-6595/ac8119
https://doi.org/10.1088/1361-6595/ac8119
Publikováno v:
Plasma Sources Science and Technology. 30:085009
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f5d77d7a7020d9103a2d358c829e9303
https://doi.org/10.1088/1361-6595/ac1b35
https://doi.org/10.1088/1361-6595/ac1b35
Publikováno v:
Plasma Sources Science and Technology. 29:075009
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5900f57edba9cd31efad0cf9be9ac79a
https://doi.org/10.1088/1361-6595/ab7609
https://doi.org/10.1088/1361-6595/ab7609
Autor:
Hideo Sugai, Keiji Nakamura
Publikováno v:
Japanese Journal of Applied Physics. 58:060101
Conventional Langmuir probe cannot be used in most reactive plasmas for materials processing, owing to the insulating layers that are deposited on the probe surface. To address this issue, a novel variety of microwave probes has been recently develop
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3c217f93d07e0b664a0a419f907c6699
https://doi.org/10.7567/1347-4065/ab1a43
https://doi.org/10.7567/1347-4065/ab1a43
Publikováno v:
Vacuum. 86:330-334
This article is devoted to presenting results of FDTD (finite difference time domain) simulation of surface waves excited in planar overdense plasmas, with the emphasis on the effect of the corrugated dielectric-plate surface on the excited wave fiel
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dfcf17b3555674503214ec7e1885b604
https://doi.org/10.1016/j.vacuum.2011.07.058
https://doi.org/10.1016/j.vacuum.2011.07.058
Publikováno v:
Applied Surface Science. 292:387-389
In this paper we describe a new method for in situ monitoring damage density of GaN substrate surface in inductively coupled plasmas (ICP) containing energetic electrons. Energetic electrons are produced by sheath acceleration of secondary electrons
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3c16b0cfc49427ba75be9acb324c2a66
https://doi.org/10.1016/j.apsusc.2013.11.149
https://doi.org/10.1016/j.apsusc.2013.11.149
Publikováno v:
Japanese Journal of Applied Physics. 57:046201
A microwave resonator probe called a curling probe (CP) was applied to in situ monitoring of a dielectric layer deposited on a chamber wall during plasma processing. The resonance frequency of the CP was analytically found to shift in proportion to t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cbd62a87b8e5f453116e1fd98eeca5ea
https://doi.org/10.7567/jjap.57.046201
https://doi.org/10.7567/jjap.57.046201
Publikováno v:
IEEJ Transactions on Fundamentals and Materials. 130:930-934
This paper reports plane-type microwave resonator (MWR) probe for electron density measurements in reactive processing plasmas. The sheath effects were investigated by electromagnetic field analysis with FDTD simulation, and the calculated characteri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fd493def8c4cfde066fe71ddf95502ed
https://doi.org/10.1541/ieejfms.130.930
https://doi.org/10.1541/ieejfms.130.930
Autor:
Kota Fukaya, Akira Fujimaki, Koichi Sasaki, Mitsuhiro Watanabe, Masumi Inoue, Junsi Gao, Taishi Kimura, Hideo Sugai
Publikováno v:
Thin Solid Films. 517:2762-2766
We correlated the crystallinity of YBaCuO films prepared by magnetron sputtering deposition using Ar/O 2 mixture gas with the atomic and molecular composition in the gas phase. YBaCuO films were deposited on MgO substrates at 670 °C. Two-dimensional
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66bdf288ab88389b4c935a3f10a26900
https://doi.org/10.1016/j.tsf.2008.11.128
https://doi.org/10.1016/j.tsf.2008.11.128
Autor:
Yukiharu Maeda, Satoshi Iwata, Hirotaka Toyoda, Hideo Sugai, Yusuke Suzuki, Yohei Sakashita, Shigeru Tsunashima, Takeshi Kato
Publikováno v:
Japanese Journal of Applied Physics. 47:7879-7885
The energy distribution of energetic particles produced in magnetron sputtering plasma was measured by varying the sputtering gas species and pressure, and Co/Pt, Gd/Fe, and Co/Cu multilayers were fabricated using the same sputtering cathodes as the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4d3b61936fb5ab8deb4b5556bdcbec99
https://doi.org/10.1143/jjap.47.7879
https://doi.org/10.1143/jjap.47.7879