Zobrazeno 1 - 10 of 31 pro vyhledávání: '"Hideo Muro"'
5
Study on MEMS Thermal Microactuators with Pedestal-Type Beam Shape and Au Electroplating
Autor: Kuniyuki Ochiai, Hideo Muro, Takahiro Osada
Publikováno v: Electronics and Communications in Japan. 97:56-61
Recently, microfluid systems have been extensively studied, and microactuators such as microvalves fabricated by microelectromechanical systems technology are essential for realizing these systems. In this paper, thermal microactuators of trapezoidal
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5c4123bf2b8fd5a466b7292853cadd4f
https://doi.org/10.1002/ecj.11632
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8
Cantilever-Type Thermal Microactuators Fabricated by SOI-MUMPs with U-Type and I-Type Configurations
Autor: Kazuki Osada, Takahiro Osada, Kuniyuki Ochiai, Hideo Muro
Publikováno v: Electronics and Communications in Japan. 96:46-51
SUMMARY Recently, micro fluid systems have been studied extensively, and microactuators such as micro valves fabricated using MEMS technology are essential for realizing these systems. This paper describes an investigation of thermal microactuators w
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::491acd97b9847f134ddff28243b91b24
https://doi.org/10.1002/ecj.11500
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9
Cantilever-Type FePd/PZT Stacked-Layer Magnetic Sensors with High Sensitivity
Autor: Hideo Muro, Motoichi Nakamura, Takashi Saito, Mio Hamashima, Teiko Okazaki, Chihiro Saito, Yasubumi Furuya
Publikováno v: Electronics and Communications in Japan. 96:8-15
SUMMARY FePd/PZT/FePd and FePd/PZT stacked-layer magnetic sensors were studied. A magnetic field was applied to the longitudinal direction of the sensor to cause longitudinal stress magnetostrictively, producing a piezoelectric output voltage in the
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c495f99d9c41394bd25f34d422d216c7
https://doi.org/10.1002/ecj.11533
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10
Self-Sustaining Vibration Sensors using Multiple Cantilever-Type Piezoelectric Bimorphs with Different Resonant Frequencies
Autor: Mio Hamashima, Zhenghao Li, Hideo Muro
Publikováno v: IEEJ Transactions on Sensors and Micromachines. 133:268-273
SUMMARY In order to realize a vibration sensor, which can operate without power supply, an optimization of the sensor configuration was studied using commercial piezoelectric bimorphs. The dependences of the energy conversion efficiency on the weight
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dd9ad71f0a7509ab7e8cbfa4f9277eb8
https://doi.org/10.1541/ieejsmas.133.268
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