Zobrazeno 1 - 10
of 114
pro vyhledávání: '"Hidemitsu Ogawa"'
Autor:
Hidemitsu Ogawa1 hidemitsu-ogawa@kuramae.ne.jp, Akira Hirabayashi2 a-hira@yamaguchi-u.ac.jp
Publikováno v:
Sampling Theory in Signal & Image Processing. 2012, Vol. 11 Issue 1, p81-93. 13p.
Autor:
Akira Hirabayashi, Hidemitsu Ogawa
Publikováno v:
Sampling Theory in Signal and Image Processing. 11:81-93
Vertical-scanning white light interferometry is a technique of profiling the surface topography of objects such as semiconductors, liquid crystal displays (LCDs), and so on. The profile is given by the “squared-envelope function” of the interfere
Publikováno v:
Journal of the Japan Society for Precision Engineering. 78:112-116
Automatic parameter optimization of the local model fitting method for single-shot surface profiling
Publikováno v:
Applied Optics. 50(no. 21):3773-3780
The local model fitting (LMF) method is a single-shot surface profiling algorithm. Its measurement principle is based on the assumption that the target surface to be profiled is locally flat, which enables us to utilize the information brought by nea
Publikováno v:
Journal of the Japan Society for Precision Engineering. 75:1315-1322
In the semiconductor and LCD manufacturing industry, there is a strong demand for measuring film thickness and surface profiles of film-covered objects. In this paper, we propose a single-shot algorithm for simultaneous measurement of film thickness
Publikováno v:
Transactions of the Society of Instrument and Control Engineers. 45:73-82
Autor:
Hidemitsu Ogawa
Publikováno v:
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences. :688-695
This paper shows that there is a fruitful world behind sampling theorems. For this purpose, the sampling problem is reformulated from a functional analytic standpoint, and is consequently revealed that the sampling problem is a kind of inverse proble
Autor:
Hidemitsu Ogawa, Akira Hirabayashi
Publikováno v:
Sampling Theory in Signal and Image Processing. 6:167-184
We propose sampling theorems that reconstruct the optimal approximation under a certain criterion from a finite number of degraded, noisy, sampled values. In that criterion, we minimize the average difference between a reconstructed function and an i
Publikováno v:
Transactions of the Society of Instrument and Control Engineers. 43:71-77
Publikováno v:
In Proceeding of the Society of Instrument and Control Engineers Annual Conference(SICE2007). :724-728
A new surface profiling technique is proposed, which enables us to measure a surface profile without a rounding effect and with extended phase measurement range. It is accomplished by a newly developed two-wavelength imaging system and the local mode