Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Hideki Mizuhara"'
Autor:
Kaori Misawa, Makoto Akizuki, Hiroyuki Aoe, Kazunobu Mameno, Hiroyuki Watanabe, Hideki Mizuhara, K. Yodoshi, Hiroshi Hanafusa, Mamoru Arimoto
Publikováno v:
Applied Surface Science. :675-679
We have developed a novel process for intermetal dielectrics (IMD) using ion-implanted organic spin-on glass (SOG). Ion implantation into the SOG films improves the hot carrier (HC) reliability, which deteriorates from the use of organic SOG films. T
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::376fd36a92678999c26f374033652359
https://doi.org/10.1016/s0169-4332(96)00956-7
https://doi.org/10.1016/s0169-4332(96)00956-7
Autor:
Seiji Samukawa, Yoshinari Ichihashi, Yasushi Ishikawa, Mitsuru Okigawa, Hideki Mizuhara, Ryu Shimizu
Publikováno v:
Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::583d8667459be1478bf27bf8068427f6
https://doi.org/10.7567/ssdm.2006.p-1-28
https://doi.org/10.7567/ssdm.2006.p-1-28