Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Hideharu Hasegawa"'
Autor:
Takasaki Toshimichi, Hideharu Hasegawa, Yoshio Ishihara, Tadahiro Ohmi, Ryousuke Fukushima, Sumiyo Yamane, Takuya Ikeda
Publikováno v:
Journal of The Electrochemical Society. 141:246-250
A measurement technology for trace impurities in hydrogen chloride (HCl) was developed in relation to future ultralarge scale integration (ULSI). We developed an electrical conductivity measurement system for analyzing liquified HCl with an in-line h
Autor:
Koh Matsumoto, Hideharu Hasegawa, Yasuhiro Takahashi, Takuya Ikeda, Akinori Ubukata, Akira Yamaguchi
Publikováno v:
Japanese Journal of Applied Physics. 32:L758
We have developed a novel catalyst to selectively reduce the amount of residual SiH4 and H2S as well as H2O in AsH3 and PH3 gases. The effectiveness of the point-of-use purifier in growing high-purity GaAs and InP by metalorganic vapor phase epitaxy
Publikováno v:
The Journal of the Society of Chemical Industry, Japan. 73:2546-2548