Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Hideaki Teranishi"'
Publikováno v:
Materials Science in Semiconductor Processing. 16:923-927
The behavior of precipitates in a floating zone silicon crystal produced from a Czochralski single-crystal ingot has been studied. Large precipitates of α-Si 3 N 4 crystal, having a dimension of about 2 μm, were formed at the mid-depth in the wafer
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::65b27185bf4b3ffef46a503ff39fdc6f
https://doi.org/10.1016/j.mssp.2013.01.020
https://doi.org/10.1016/j.mssp.2013.01.020
Precipitates Caused in Silicon Wafers by Prolonged High-Temperature Annealing in Nitrogen Atmosphere
Publikováno v:
MRS Proceedings. 1591
The precipitate behavior in a floating zone silicon crystal produced from a Czochralski single-crystal ingot has been studied. Large precipitates of α-Si3N4 crystal, having a dimension of about 2 μm, were formed at the mid-depth in the wafer by mea
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b94396c13557b2d8adf8b46621c591a8
https://doi.org/10.1557/opl.2014.294
https://doi.org/10.1557/opl.2014.294
Publikováno v:
Surface and Coatings Technology. :503-507
A large diameter electron cyclotron resonance plasma was produced with a multi-slot antenna. The radial profile of the ion saturation current was examined as a function of input microwave power, gas pressure and magnetic mirror coil current to determ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d33bf6f3d4ec7c1fb862c048d750b4cf
https://doi.org/10.1016/0257-8972(95)08253-0
https://doi.org/10.1016/0257-8972(95)08253-0
Precipitates formed in silicon wafers by prolonged high-temperature annealing in nitrogen atmosphere
Publikováno v:
Japanese Journal of Applied Physics. 53:05FJ05
A floating zone (FZ) silicon wafer produced from a Czochralski (CZ) single-crystal ingot was subjected to prolonged annealing at a high temperature in a N2 (70%) + O2 (30%) ambient. Precipitates were formed and their regions manifested themselves as
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4832c26e357162ff4a99b41c0bf58f12
https://doi.org/10.7567/jjap.53.05fj05
https://doi.org/10.7567/jjap.53.05fj05
Publikováno v:
Japanese Journal of Applied Physics; May2014, Vol. 53 Issue 5S1, p1-1, 1p