Wafer-scale HfO2 encapsulated silicon nanowire field effect transistor for efficient label-free DNA hybridization detection in dry environment

Autor: Jayakumar, Ganesh, Legallais, Maxime, Hellstrom, Per-Erik, Mouis, Mireille, Pignot-Paintrand, Isabelle, Stambouli-Sene, Valerie, TERNON, Céline, Östling, Mikael

Publikováno v: Nanotechnology
Nanotechnology, 2019, 30, pp.184002+12. ⟨10.1088/1361-6528/aaffa5⟩
Nanotechnology, Institute of Physics, 2019, 30, pp.184002+12. ⟨10.1088/1361-6528/aaffa5⟩

International audience; Silicon nanowire (SiNW) charge based biosensors are attractive for DNA sensing applications due to their compactness and large surface-to-volume ratio. Small feature size, low production cost, repeatability, high sensitivity a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::5cfd0130dc2a1a3cbfa4554a32d7b404
https://hal.science/hal-02012585/document