Zobrazeno 1 - 4
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pro vyhledávání: '"Herschel Marchman"'
Publikováno v:
Microlithography: Science and Technology, Second Edition
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8dd39fcadd41d577a4774f208e10208e
https://doi.org/10.1201/9781420051537.ch14
https://doi.org/10.1201/9781420051537.ch14
Autor:
Herschel Marchman
Publikováno v:
The 1998 international conference on characterization and metrology for ULSI technology.
The scanning electron microscope (SEM) is currently poised as the instrument of choice for ULSI dimensional metrology because of its high resolution, throughput, and automation. Despite high resolution, several issues do exist which currently limit t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7921ceef64d2f5de317058521f248e2d
https://doi.org/10.1063/1.56837
https://doi.org/10.1063/1.56837
Introduction Analyzing the synaptic basis of neuronal circuits within a volume of brain tissue requires electron microscopy. With a resolution capable of seeing the smallest synaptic contacts, this method uses different sectioning techniques to produ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2d7041f3cbb3e6c078356ef182daeb98
https://infoscience.epfl.ch/record/134997
https://infoscience.epfl.ch/record/134997