Výsledky vyhledávání - "Herman Soemers"

A single-mask thermal displacement sensor in MEMS

Autor: B. Krijnen, Johannes Bernardus Charles Engelen, J.W. van Dijk, Léon A. Woldering, Leon Abelmann, R.P. Hogervorst, Dannis Michel Brouwer, Herman Soemers

Publikováno v: Journal of micromechanics and microengineering, 21(7), 074007-074019. IOP Publishing Ltd.

This work presents a MEMS displacement sensor based on the conductive heat transfer of a resistively heated silicon structure towards an actuated stage parallel to the structure. This differential sensor can be easily incorporated into a silicon-on-i

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::34d41a345012202dc4e52fccc8ed43a0
https://doi.org/10.1088/0960-1317/21/7/074007

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Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator

Autor: Henri Jansen, M.J. de Boer, Gijs Krijnen, Dannis Michel Brouwer, Boudewijn R de Jong, Herman Soemers

Publikováno v: Journal of microelectromechanical systems, 19(5), 1116-1130. IEEE

This paper presents the design, modeling, and fabrication of a planar three-degrees-of-freedom parallel kinematic manipulator, fabricated with a simple two-mask process in conventional highly doped single-crystalline silicon (SCS) wafers (100). The m

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cd5e080ae00a5da70e2143c50c70d057
https://doi.org/10.1109/jmems.2010.2067196

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Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

Autor: J. van Dijk, Dannis Michel Brouwer, Herman Soemers, B.R. de Jong

Publikováno v: Journal of micromechanics and microengineering, 16(6), 7-12. IOP Publishing Ltd.

A design is presented for a relatively large force (0.5 mN) high-precision MEMS clamping mechanism. The clamp is a part of a MEMS transmission electron microscope (TEM) sample manipulator, which needs to be fixed unpowered once positioned. The elasti

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f8c8b90da71cd7a325dc51c372522961
https://doi.org/10.1088/0960-1317/16/6/s02

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Design of an Experimental Set-Up to Study the Behavior of a Flexible Surgical Instrument Inside an Endoscope

Autor: Herman Soemers, Ronald G.K.M. Aarts, Dannis Michel Brouwer, Jitendra P. Khatait, Justus Laurens Herder

Publikováno v: Journal of Medical Devices, 7(3):031004, 031004-031015. American Society of Mechanical Engineers (ASME)

The success of flexible instruments in surgery requires high motion and force fidelity and controllability of the tip. However, the friction and the limited stiffness of such instruments limit the motion and force transmission of the instrument. In a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::45d9d90b7e42e6a6b9bfc49947c4ca22
https://doi.org/10.1115/1.4024660

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A 2-DOF Large Stroke Flexure Based Positioning Mechanism

Autor: Just L. Herder, Dannis Michel Brouwer, Steven Boer, Herman Soemers, K. G. P. Folkersma

Publikováno v: ASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference: Volume 4: 36th Mechanisms and Robotics Conference, Parts A and B, 221-228
STARTPAGE=221;ENDPAGE=228;TITLE=ASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference

Flexure based stages are particularly important for vacuum applications because they combine low hysteresis, no wear and no contamination with a high supporting stiffness. However, flexure hinges inherently lose stiffness in supporting directions whe

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::27d5813438b3a72197073a8783be0c3f
https://research.utwente.nl/en/publications/ad37ee1b-28cf-4958-88a1-3faa6f4cdb66

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Sensor fusion for active vibration isolation in precision equipment

Autor: Herman Soemers, D. Tjepkema, J. van Dijk

Publikováno v: Journal of sound and vibration, 331(4), 735-749. Academic Press

Sensor fusion is a promising control strategy to improve the performance of active vibration isolation systems that are used in precision equipment. Normally, those vibration isolation systems are only capable of realizing a low transmissibility. Add

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7195d95d1f816e7113de4def93f6df28
https://research.utwente.nl/en/publications/91a997b3-1cd7-4960-9a87-83fe336f5c4e

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Design and modeling of a six DOF's MEMS-based precision manipulators

Autor: Dannis Michel Brouwer, Herman Soemers, B.R. de Jong

Publikováno v: Precision engineering, 34(2), 307-319. Elsevier

In this paper a design is presented for a precision MEMS-based six degrees-of-freedom (DOFs) manipulator. The purpose of the manipulator is to position a small sample (10 μm × 20 μm × 0.2 μm) in a transmission electron microscope. A parallel kin

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6d71dd556d865f0e5612228c35bf8ee1
https://research.utwente.nl/en/publications/c2b52623-46db-4d5d-9cef-3bd6a964fbd3

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Mechatronic design of a fast and long range 4 degrees of freedom humanoid neck

Autor: Stefano Stramigioli, J. Bennik, J. Leideman, Herman Soemers, Dannis Michel Brouwer

Publikováno v: 2009 IEEE International Conference on Robotics and Automation, 574-579
STARTPAGE=574;ENDPAGE=579;TITLE=2009 IEEE International Conference on Robotics and Automation
ICRA

This paper describes the mechatronic design of a humanoid neck. To research human machine interaction, the head and neck combination should be able to approach the human behavior as much as possible. We present a novel humanoid neck concept that is b

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::40c71359ad890f887237a0ff78263d7c
https://research.utwente.nl/en/publications/5cc8194a-836c-42f4-8fcc-1a4b359432b4

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Design and fabrication of a MEMS mirror for miniature laser projection

Autor: Rene Sanders, Diederik Van Lierop, Boudewijn Ruben De Jong, Herman Soemers

Publikováno v: SPIE Proceedings.

For miniature laser projection displays the laser beam is swept very fast back and forth with a MEMS mirror. This paper presents an innovative design for such a MEMS mirror. Both the dynamical behavior and manufacturability have been improved. We des

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::1df004157d1dfdf4827ce15618debd61
https://doi.org/10.1117/12.807639

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MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators

Autor: Henri Jansen, Herman Soemers, B.R. de Jong, M.J. de Boer, Gijsbertus J.M. Krijnen, J. van Dijk, Dannis Michel Brouwer

Publikováno v: Journal of micromechanics and microengineering, 19(6):065027. IOP Publishing Ltd.

In this paper the design, modeling and fabrication of a precision MEMS-based clamp with a relatively large clamping force are presented. The purpose of the clamp is to mechanically fix a six-degree-of-freedom (DOF) MEMS-based sample manipulator (Brou

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4fdc2336bcb75905a4b6b4bde0a6bf28
https://research.utwente.nl/en/publications/1ff8b9bd-6cb7-4e48-b30c-62e95305feb5

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