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Publikováno v:
Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT). 2010:001030-001053
Thin wafers have become a basic need for a wide variety of new microelectronic products. Thinner die are being required to fit into thinner packages. Wafers that have been thinned using a final wet etch process on the backside have less stress compar