Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Herman Boerland"'
Autor:
Herman Boerland, Anush Hovhannisyan, Mikhayil Mkrtchyan, Hari Konnanur, Mitsuya Toda, Mirai Anazawa
Publikováno v:
Photomask Japan 2022: XXVIII Symposium on Photomask and Next-Generation Lithography Mask Technology.
Autor:
Ronald J. Lesnick, Herman Boerland
Publikováno v:
SPIE Proceedings.
With every new process generation mask complexity and costs continue to increase, driving new requirements for critical dimension control and mask qualification. Identifying and categorizing features to be measured and verified during mask qualificat
Autor:
Stefan Doebereiner, Anthony Grimshaw, Thomas Schatz, Andrew C. Hourd, Gordon Hughes, Parkson W. Chen, Hans-Jürgen Brück, Paul J. M. van Adrichem, Shiuh-Bin Chen, Herman Boerland, Alexander Petrashenko, Gerd Scheuring, Thomas Struck, Sigrid Lehnigk, Frank Hillmann
Publikováno v:
19th European Conference on Mask Technology for Integrated Circuits and Microcomponents.
Besides the metrology performance of a CD measurement tool, its close integration into a manufacturing environment becomes more and more important. This is extremely driven by the ever increasing complexity of masks and their tightening specification