Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Herbert A. Waggener"'
Publikováno v:
Photomask and X-Ray Mask Technology.
Mask and reticle writing requirements for 256 Mb and 1 Gb DRAM production will place stringent demands on lithography tool capabilities. The Lepton EBES4 mask writer addresses these requirements by utilizing advanced generation e-beam technology whic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::13849d9149c42ab226ef171eba19d2f1
https://doi.org/10.1117/12.191923
https://doi.org/10.1117/12.191923
Autor:
A. R. von Neida, Herbert A. Waggener, Darryl Peters, D. C. Fowlis, C. M. Rose, William P. Wilson
Publikováno v:
Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III.
Performance specifications, electron gun parameters, selected testing results, and calculated throughput are presented for the second prototype EBES4 which is entering manufacture. The thermal field emitter electron gun is designed for high flux, hig
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ff2f24f573c529275f588a1a38f4c73f
https://doi.org/10.1117/12.146505
https://doi.org/10.1117/12.146505
Autor:
William P. Wilson, A. R. von Neida, D. C. Fowlis, Herbert A. Waggener, Darryl Peters, C. M. Rose
Publikováno v:
SPIE Proceedings.
Performance specifications, electron gun parameters, testing results to date, and throughput are presented for the second prototype EBES4 which is entering manufacture. The thermal field emitter electron gun is designed for high flux, high current st
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28db5e3888306f87646e698411597393
https://doi.org/10.1117/12.142146
https://doi.org/10.1117/12.142146
Autor:
Darryl Peters, C. M. Rose, J. Caracci, A. Chitayat, G. Chen, Herbert A. Waggener, D. C. Fowlis
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 9:3033
A study was undertaken to quantify and minimize mechanically induced sources of electron‐beam positioning errors in Lepton EBES4. Stage performance was improved by replacing the x axis rotary motor and ball‐screw drive with a brushless, sinewave,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4649f4b7d143571f8e2c19d282dd8d31
https://doi.org/10.1116/1.585364
https://doi.org/10.1116/1.585364
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