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pro vyhledávání: '"Henry Meggens"'
Autor:
Paul van Adrichem, Fei Du, Youri van Dommelen, Rafael Aldana, Keith Gronlund, Roel Knops, Robert John Socha, Henry Meggens, Ronald Goossens, Venu Vellanki, Justin Gau, Dorothe Oorschot, Stephen Hsu, Koen Schreel, Wenjin Shao, Liesbeth Reijnen, Luoqi Chen, Zongchang Yu, Xu Xie
Publikováno v:
Japanese Journal of Applied Physics. 50:06GB01
FlexRay programmable illumination and LithoTuner software is combined in several use cases. The first use case is source mask optimization (SMO) in which the process window is maximized for a static random access memory (SRAM) design. In a 55 nm half
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4de61f7ee2460746ea7e366a07724c72
https://doi.org/10.1143/jjap.50.06gb01
https://doi.org/10.1143/jjap.50.06gb01
