Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Henry Kaptyen"'
Autor:
Henry Kaptyen, Sonia Castellanos, Eric Rinard, Esben W. Larsen, Nadia Vandenbroeck, John S. Petersen, Daisy Raymondson, Rod Ward, Danilo De Simone, Seth L. Cousin, Kevin Dorney, Peter De Schepper, C. Bargsten, Fabian Holzmeier, Dhirendra P. Singh, Paul van der Heide, Alessandro VaglioPret, Thomas Nuytten
Publikováno v:
Novel Patterning Technologies 2021.
Recently, imec has installed and commissioned an industrial, ultrafast EUV materials characterization and lithography lab, imec’s AttoLab, with a primary aim to explore limits of photoresist performance and their associated ultrafast chemistries. H
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c896d7feed26b318a41922fdb5f5487
https://doi.org/10.1117/12.2595048
https://doi.org/10.1117/12.2595048
Publikováno v:
Conference on Lasers and Electro-Optics.
We report on the first to our knowledge direct diode-pumped Ti:sapphire ultrafast regenerative amplifier system. Pumped with CW 450nm fiber-coupled laser diode modules and employing cryocooling of the ti:sapphire, this first implementation produces m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c7d7ff3609b2ffea5a0b9677320f8368
https://doi.org/10.1364/cleo_si.2017.sm3i.5
https://doi.org/10.1364/cleo_si.2017.sm3i.5