Zobrazeno 1 - 10
of 32
pro vyhledávání: '"Hengpeng Wu"'
Autor:
Masato Suzuki, YoungJin Kim, YoungJun Her, Hengpeng Wu, Kun Si, Mark Maturi, Philipp-Hans . Fackler, Mansour Moinpour, Ralph Dammel, Yi Cao
Publikováno v:
Advances in Patterning Materials and Processes XL.
Autor:
Zongbao, Zhou, Jiangwei, Xiao, Sheng, Huang, Hengpeng, Wu, Shuwen, Guan, Tingting, Wu, Shan, Yu, Shuai, Huang, Botao, Gao
Publikováno v:
International Journal of Biological Macromolecules. 230:123158
Local hemostats still face obstacles to efficiently achieving hemostasis and promoting wound healing. Herein, a series of multifunctional well-degradable hemostatic sponges based-on carboxymethylated yeast β-glucan (CMYG) were fabricated by lyophili
Autor:
Jianhui Shan, Kazunori Kurosawa, Hengpeng Wu, Shinji Miyazaki, Young Jun Her, Jihoon Kim, Jian Yin, Yi Cao, Guanyang Lin, Jingxiu Wan
Publikováno v:
Journal of Photopolymer Science and Technology. 26:573-579
Autor:
Jae-woo Nam, Jongsu Lee, Jian Yin, Yi Cao, Boon Teik Chan, Arjun Singh, Hengpeng Wu, Roel Gronheid
Publikováno v:
SPIE Proceedings.
Directed self-assembly (DSA) of block copolymers (BCP) has attracted significant interest as a patterning technique over the past few years. We have previously reported the development of a new process flow, the CHIPS flow (Chemo-epitaxy Induced by P
Autor:
Kathleen Nafus, Roel Gronheid, Christopher J. Thode, Guanyang Lin, Hengpeng Wu, Mark Somervell, Paul F. Nealey, Paulina Rincon Delgadillo, Yi Cao
Publikováno v:
Journal of Photopolymer Science and Technology. 25:77-81
Autor:
Shinji Miyazaki, David J. Abdallah, Douglas Mckenzie, Ruzhi Zhang, Woo-Kyu Kim, Lyudmila Pylneva, Ralph R. Dammel, Dalil Rahman, Hengpeng Wu, P-H. Lu, M. Nisser, Alberto D. Dioses, Allen Timko, Frank Houlihan
Publikováno v:
Journal of Photopolymer Science and Technology. 20:697-705
New challenges face ArF bottom antireflection coatings (BARCs) with the implementation of high NA lithography and the concurrent increase use of spin-on hard masks. To achieve superior reflectivity control with high NA at least two semi-transparent A
Autor:
Francis M. Houlihan, Hengpeng Wu, Ping-Hung Lu, Joseph E. Oberlander, Alexandra Krawicz, Medhat A. Toukhy, Andrew Romano, Salem K. Mullen, Alberto D. Dioses, Mark Neisser
Publikováno v:
Journal of Photopolymer Science and Technology. 20:359-364
Our approach towards a second generation radiation sensitive developable bottom antireflective coating (DBARC's) for 193 nm and its use with different implant resist resin types will be discussed. Ion beam implant resistance (As implantation 15 KeV a
Autor:
Jianhui Shan, Tomohiko Tsutsumi, YoungJun Her, Yi Cao, Hengpeng Wu, Jian Yin, Jihoon Kim, Claire Petermann, Guanyang Lin
Publikováno v:
Alternative Lithographic Technologies VII.
Significant progresses on 300 mm wafer level DSA (Directed Self-Assembly) performance stability and pattern quality were demonstrated in recent years. DSA technology is now widely regarded as a leading complementary patterning technique for future no
Publikováno v:
Advanced Materials. 13:703-714
Autor:
Kathleen Nafus, Paulina Rincon Delgadillo, Yi Cao, Hengpeng Wu, Mark Somervell, Roel Gronheid, Paul F. Nealey, Christopher J. Thode
Publikováno v:
Alternative Lithographic Technologies IV.
Directed Self-Assembly (DSA) of block copolymers is considered to be a potential lithographic solution to achieve higher feature densities than can be obtained by current lithographic techniques. However, it is still not well-established how amenable