Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Helene Duchemin"'
Autor:
Helene Lhermer, Dihia Sidi Ahmed, Audrey Berthelot, Antoine Nowodzinski, Alexandra Kournela, Christoforos G. Theodorou, Helene Duchemin, Cyril Dressler
Publikováno v:
2018 IEEE SENSORS
2018 IEEE SENSORS, Oct 2018, New Delhi, India. pp.1382, ⟨10.1109/ICSENS.2018.8589872⟩
2018 IEEE SENSORS, Oct 2018, New Delhi, India. pp.1382, ⟨10.1109/ICSENS.2018.8589872⟩
session C1L-A: gas sensors & stochastic effects; International audience; This paper describes the study carried out in order to characterize the influence of the main fabrication steps of the silicon nano-gauge on their l/f noise. Geometry of the nan
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::11e3c3e02d9f29233da1bbbce89aaf80
https://hal.science/hal-02002311
https://hal.science/hal-02002311
Autor:
Philippe Robert, Audrey Berthelot, Guillaume Jourdan, H. Blanc, Patrice Rey, Romain Anciant, Helene Duchemin
Publikováno v:
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).
This paper reports for the first time the experimental pressure response of an ultra-compact and highly linear absolute pressure sensor based on suspended piezoresistive nano-gauges with mechanical amplification and embedded low voltage self-test. Na
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::71971aac92db5d3d21360a7d7fcacad1
https://doi.org/10.1109/memsys.2016.7421762
https://doi.org/10.1109/memsys.2016.7421762
