Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Helen E Rebenne"'
Autor:
Deepak G. Bhat, Helen E. Rebenne
Publikováno v:
Surface and Coatings Technology. 63:1-13
Titanium nitride (TiN) deposited by chemical vapor deposition (CVD) techniques has been the premier wear-resistant coating in many applications for the last several decades. This review presents a history of developments in the technology of CVD TiN
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b770b5aa01c2926dbdab946fbca50954
https://doi.org/10.1016/s0257-8972(05)80002-7
https://doi.org/10.1016/s0257-8972(05)80002-7
Autor:
Arthur W. Sleight, Milton Harris, Narendra B. Dahotre, S.B. Bhaduri, Dawn R. White, Deepak G. Bhat, Rajiv Asthana, Helen E. Rebenne
Publikováno v:
Materials Technology. 8:76-82
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8977a7c1910829e56f0277daaffa0b53
https://doi.org/10.1080/10667857.1993.11784947
https://doi.org/10.1080/10667857.1993.11784947
Publikováno v:
MRS Proceedings. 282
In this work, a hydrogen (H2) reduction process has been developed which gives tungsten (W) nucleation on titanium nitride (TiN) adhesion layers with a very short incubation time, eliminating the need for a silane (SiH4reduced seed layer. The nucleat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d87c61dc753eebc93a517503f61df602
https://doi.org/10.1557/proc-282-365
https://doi.org/10.1557/proc-282-365
Autor:
Helen E Rebenne
Publikováno v:
Materials and Manufacturing Processes. 9:563-564
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4fab64de59163585a10cca6a803bb549
https://doi.org/10.1080/10426919408934925
https://doi.org/10.1080/10426919408934925
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