A high-Tc superconductor bolometer on a silicon nitride membrane.

Autor: Sanchez, Stefan, de Vries, Robert, Elwenspoek, Miko, Gui, Chengqun, De Nivelle, Martin J. M. E., De Korte, Piet A. J., Bruijn, Marcel P., Wijnbergen, Jan J., Michalke, Wolfgang, Steinbeib, Erwin, Heidenblut, Tortsen, Schwierzi, Bernhahrd

Publikováno v: Journal of Microelectromechanical Systems; Mar98, Vol. 7 Issue 1, p62, 7p, 11 Black and White Photographs, 6 Diagrams, 5 Graphs