Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Hegen Xu"'
Publikováno v:
Journal of Micromechanics and Microengineering. 16:2747-2754
We propose a hysteresis and drift compensation scheme using proportional-integral feedback control for a nanopositioning Pb(ZrTi)O3 (PZT) microstage. A multi-degree of freedom PZT microstage with integrated differential capacitive displacement sensor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c5abe7af58092bd429cd22eafd18b3cf
https://doi.org/10.1088/0960-1317/16/12/031
https://doi.org/10.1088/0960-1317/16/12/031
Publikováno v:
Microsystem Technologies. 12:883-890
This paper reports on the fabrication and characterizations of a monolithic Pb(ZrTi)O3 (PZT) microstage with multi-degrees of freedom for high-precision positioning. The entire device is fabricated in a symmetrical arrangement from a PZT plate with a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::113957ca6e2c7008cab0be1c2c25adef
https://doi.org/10.1007/s00542-006-0206-z
https://doi.org/10.1007/s00542-006-0206-z
Publikováno v:
Future Medical Engineering Based on Bionanotechnology.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8b02cccfaec2102b5737bf04a3e31d05
https://doi.org/10.1142/9781860948800_0066
https://doi.org/10.1142/9781860948800_0066
Publikováno v:
SPIE Proceedings.
This paper presents the fabrication and characterizations of a PZT actuated monolithic microstage with multi degrees of freedom (DOFs) used for high-precision positioning. The entire device is fabricated in a symmetrically arrangement from a PZT plat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::78142e10a93623b011879eaadd531546
https://doi.org/10.1117/12.667849
https://doi.org/10.1117/12.667849
Publikováno v:
Future Medical Engineering Based on Bionanotechnology - Proceedings of the Final Symposium of the Tohoku University 21st Century Center of Excellence Program; 2006, p601-611, 11p