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pro vyhledávání: '"Hee-Won Sunwoo"'
Autor:
Seongchae Choi, Hee-Won Sunwoo, Shijin Seong, Dongchul Ihm, Ho-Kyu Kang, Jun-Bum Lee, Byoung-Ho Lee, Dong-Ryul Lee, Soo-Bok Chin, Jeong-Ho Ahn, Hyung-Seop Kim
Publikováno v:
SPIE Proceedings.
This paper presents a methodology for detecting defects more effectively that have a substantial yield impact on several critical layers using a simulation program, which is considerably helpful in analyzing defects on the wafer. First, this paper pr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cb212c8f67378c418a62c4651ec699ca
https://doi.org/10.1117/12.2011387
https://doi.org/10.1117/12.2011387
