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pro vyhledávání: '"He, Kaiting"'
Autor:
Qiang Wu, Weiming He, He Kaiting, Yi-Shih Lin, Yuntao Jiang, Guogui Deng, Lihong Xiao, Bin Xing, Jingan Hao, Qiang Zhang, Xuelong Shi, Chang Liu
Publikováno v:
SPIE Proceedings.
In this paper, we present a study on the overlay (OVL) shift issue in contact (CT) layer aligned to poly-silicon (short as poly) layer (prior layer) in an advanced technology node [1, 2]. We have showed the wafer level OVL AEI-ADI shift (AEI: After E
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d9d374cc0ba8462d90527884a8322d5d
https://doi.org/10.1117/12.2220013
https://doi.org/10.1117/12.2220013
Akademický článek
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Autor:
Sanchez, Martha I., Ukraintsev, Vladimir A., Deng, Guogui, Hao, Jingan, Xiao, Lihong, Xing, Bin, Jiang, Yuntao, He, Kaiting, Zhang, Qiang, He, Weiming, Liu, Chang, Lin, Yi-Shih, Wu, Qiang, Shi, Xuelong
Publikováno v:
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97782C-97782C-13, 9680432p
Autor:
He K; School of Acupuncture-Moxibustion and Tuina, Shandong University of CM, Jinan 250355, China., Zhang Q; Shenzhen Frontier Chinese Medicine Research Co. Ltd., Yue J; Shenzhen Frontier Chinese Medicine Research Co. Ltd., Pu T; School of Acupuncture-Moxibustion and Tuina, Beijing University of CM., Chi H; Clinical Medicine School, Southwest Medical University., Wu Q; International Institute of Acupuncture and Rehabilitation, Wenzhou Medical University., Jiang S; International Institute of Acupuncture and Rehabilitation, Wenzhou Medical University., Yang G; Department of Specialty Medicine, Ohio University, Ohio 43055, USA.
Publikováno v:
Zhongguo zhen jiu = Chinese acupuncture & moxibustion [Zhongguo Zhen Jiu] 2024 Nov 12; Vol. 44 (11), pp. 1357-62.