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pro vyhledávání: '"Haye Witteveen"'
Autor:
Erwin Berenschot, Roald M. Tiggelaar, Bjorn Borgelink, Chris van Kampen, Cristian S. Deenen, Yasser Pordeli, Haye Witteveen, Han J. G. E. Gardeniers, Niels R. Tas
Publikováno v:
ACS Applied Nano Materials, 5(10), 15847-15854. American Chemical Society
High-density arrays of silicon wedges bound by {111} planes on silicon (100) wafers have been created by combining convex corner lithography on a silicon dioxide hard mask with anisotropic, crystallographic etching in a repetitive, self-aligned multi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::41b8cf7cf06129435ab81af6682e5a2c
https://doi.org/10.1021/acsanm.2c04079
https://doi.org/10.1021/acsanm.2c04079
