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A novel SOI-MEMS ‘Micro- Swing’ time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range

Autor: Rajaraman, V., Hau, B. S., Rocha, Luís A., Dias, R. A., Makinwa, K. A. A., Dekker, R.

Here we report the design, modelling, fabrication and initial characterisation results of a new SOI-MEMS “micro-swing” time-accelerometer. Time-based acceleration sensing can be performed using either the embedded piezoresistors or the capacitive

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______307::d7e32141f75f2235b772f100f7838be8
https://hdl.handle.net/1822/14737

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Design of a flexible contact-mode piezoresistive detector for time-based high sensitivity acceleration sensing

Autor: Rajaraman, V., Hau, B. S., Rocha, L. A., French, P. J., Makinwa, K. A. A.

This work reports on the design and modeling of a new flexible contact-mode 1-DOF piezoresistive contact-force and impacttime detector used for acceleration sensing in the time domain. The key advantages of the contact-mode detection mechanism are th

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______307::5a9e7e9860d7fb7dad72c36637d9c464
https://hdl.handle.net/1822/13256

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