Zobrazeno 1 - 10
of 28
pro vyhledávání: '"Haruo Uyama"'
Publikováno v:
Thin Solid Films. 437:123-126
The role of oxygen-radical (O-radical) in oxidation of titanium (Ti) by O-radical beam assisted evaporation was studied by in situ measurement of the deposition rate using a quartz crystal microbalance. Ti was evaporated simultaneously with oxygen mo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1b4ba9bf7d90e70f8e5bca7e8de01eb7
https://doi.org/10.1016/s0040-6090(03)00676-x
https://doi.org/10.1016/s0040-6090(03)00676-x
Publikováno v:
Vacuum. 66:347-352
The effect of simultaneous irradiation of an oxygen-(O-IB), an argon-(Ar-IB), a krypton-(Kr-IB), and a xenon-(Xe-IB) ion beam on an oxygen-radical beam-assisted evaporation (O-RBAE) was studied to deposit titanium oxide films with high refractive ind
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ff37ef88e2b9398021fbef571ca3fdd5
https://doi.org/10.1016/s0042-207x(02)00142-2
https://doi.org/10.1016/s0042-207x(02)00142-2
Publikováno v:
Vacuum. 66:305-310
The surface modified poly(ethylene terephthalate) (PET) film by its exposure to O-ion beam or O-radical beam, and the buried interface between an oxide layer and PET have been investigated by using sum-frequency generation. The O-ion beam exposure in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f344bbcbb40c9a4f12875d06c83ba29c
https://doi.org/10.1016/s0042-207x(02)00135-5
https://doi.org/10.1016/s0042-207x(02)00135-5
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 19:2479-2482
The effect of simultaneous irradiation of an oxygen-ion beam (O-IB) or an argon-ion beam (Ar-IB) on an oxygen-radical beam assisted evaporation (O-RBAE) was studied to deposit titanium–oxide films with high refractive indices at low substrate tempe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d2265b6a575fbc9009d2561ad26f54f5
https://doi.org/10.1116/1.1388617
https://doi.org/10.1116/1.1388617
Publikováno v:
Applied Surface Science. 180:126-137
The surface molecular orientation of biaxially stretched poly(ethylene terephthalate) (PET) films and the effect of the oxygen-ion and oxygen-radical beam irradiation on it have been investigated by using infrared–visible sum-frequency generation (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::959f5670f15a3c1e8e964fe46d974790
https://doi.org/10.1016/s0169-4332(01)00329-4
https://doi.org/10.1016/s0169-4332(01)00329-4
Autor:
Hiroshi Fujiyama, Takahiro Harada, Noritoshi Tomikawa, Haruo Uyama, Kyoichi Yamamoto, Sung-Chae Yang
Publikováno v:
Thin Solid Films. 345:94-98
In the web coating process of some materials using sputtering, plasma-assisted evaporation, and plasma-enhanced C VD, heat damage of polymer substrates by plasma irradiation is problem for the quality of products. During deposition, the substrate is
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8e4c1fb80883763d0edac4a9c0f489c9
https://doi.org/10.1016/s0040-6090(99)00075-9
https://doi.org/10.1016/s0040-6090(99)00075-9
Publikováno v:
Plasma Chemistry and Plasma Processing. 14:491-504
The synergistic effects o1 driving frequency of the discharge and catalysis of iron and molybdenum wires when then are placed in nitrogen-h ydrogen radio-frequency and microwave plasmas mere investigated. The ammonia Yield increased in the plasmas pr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9f95986b1365e7ccd8de74cf85f1bc29
https://doi.org/10.1007/bf01570208
https://doi.org/10.1007/bf01570208
Publikováno v:
Plasma Chemistry and Plasma Processing. 13:117-131
The catalytic effect of iron wires on plasma syntheses of ammonia and hydrazine has been studied in the nitrogen-hydrogen plasma prepared using rf discharge at a pressure of 650 Pa (5 Torr). The product was mainly ammonia including a small amount of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2682f162e810ff90f81159fd1cc706e1
https://doi.org/10.1007/bf01447174
https://doi.org/10.1007/bf01447174
Publikováno v:
Journal of The Electrochemical Society. 139:2253-2259
The diamond deposition on molybdenum and niobium substrates with Ar-CO [0.1 volume percent (v/o)]-H 2 plasma jets was carried out at 26 kPa by varying hydrogen concentration and exposure time. At 2 and 3 v/o hydrogen added to the plasma let (H 2 /CO=
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fbfe5bea30fa1fa5a4f5068af6d1bfef
https://doi.org/10.1149/1.2221211
https://doi.org/10.1149/1.2221211
Publikováno v:
Thin Solid Films. 189:313-319
The effect of hydrogen as a dilution gas on the deposition of diamond-like carbon by the decomposition of methane in a microwave discharge was studied from surface analysis of the substrate and from plasma diagnostics. When carbon deposited from a CH
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca20ed850b862ddff781e45671786c60
https://doi.org/10.1016/0040-6090(90)90460-u
https://doi.org/10.1016/0040-6090(90)90460-u