Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Harumi Masudome"'
Autor:
Hiroko Abe, Harumi Masudome
Publikováno v:
Surface and Interface Analysis. 43:664-668
In this contribution, we examined chemical information depth profiling of metal oxide film by time-of-flight Secondary Ion Mass Spectrometry (ToF-SIMS). We focused on the oxidation of copper film used in a semiconductor field. As a result of the inve
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::984a177b54b5b3fc120b5d565403ecde
https://doi.org/10.1002/sia.3504
https://doi.org/10.1002/sia.3504
Publikováno v:
Journal of Japan Institute of Electronics Packaging. 14:69-71
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::56607a67c838d5306ade1e09f5f182b2
https://doi.org/10.5104/jiep.14.69
https://doi.org/10.5104/jiep.14.69