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pro vyhledávání: '"Haruka Tozato"'
Autor:
Kazutada Ikenaga, Takahito Okuyama, Haruka Tozato, Taro Nishimura, Shogo Sasaki, Ken Goto, Masato Ishikawa, Yoshihiko Takinami, Hideaki Machida, Yoshinao Kumagai
Publikováno v:
Japanese Journal of Applied Physics. 62:SF1019
In metalorganic vapor phase epitaxy of β-Ga2O3 using triethylgallium (TEGa) and O2 as precursors and Ar as the carrier gas, the gases directly above the substrate were sampled and analyzed by time-of-flight mass spectrometry. TEGa was found to decom
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b37f4ef050b1664d3fc12ae44e0275c6
https://doi.org/10.35848/1347-4065/acc53c
https://doi.org/10.35848/1347-4065/acc53c
