Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Haruka Tozato"'
Autor:
Kazutada Ikenaga, Takahito Okuyama, Haruka Tozato, Taro Nishimura, Shogo Sasaki, Ken Goto, Masato Ishikawa, Yoshihiko Takinami, Hideaki Machida, Yoshinao Kumagai
Publikováno v:
Japanese Journal of Applied Physics. 62:SF1019
In metalorganic vapor phase epitaxy of β-Ga2O3 using triethylgallium (TEGa) and O2 as precursors and Ar as the carrier gas, the gases directly above the substrate were sampled and analyzed by time-of-flight mass spectrometry. TEGa was found to decom
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b37f4ef050b1664d3fc12ae44e0275c6
https://doi.org/10.35848/1347-4065/acc53c
https://doi.org/10.35848/1347-4065/acc53c
Autor:
Goto, Ken, Nishimura, Taro, Ishikawa, Masato, Okuyama, Takahito, Tozato, Haruka, Sasaki, Shogo, Ikenaga, Kazutada, Takinami, Yoshihiko, Machida, Hideaki, Kumagai, Yoshinao
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2023, Vol. 41 Issue 4, p1-9, 9p