Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Haruhito Morihiro"'
Autor:
Yasuyori SATO, Haruhito MORIHIRO, Yoshihiro EDO, Ken IWANAMI, Shinpei FUJITA, Kazuhiro YOSHIKAWA, Kenichi KITAMURA
Publikováno v:
The Proceedings of the Transportation and Logistics Conference. :SS1-1
Publikováno v:
The Proceedings of the Transportation and Logistics Conference. :3308
Autor:
Naoki Fukata, Kunitomo Morisawa, Masatoshi Tsujimura, Masahiro Kitajima, Noriyuki Uchida, Ryota Shirakawa, Kunie Ishioka, Kouichi Murakami, Haruhito Morihiro
Publikováno v:
Japanese Journal of Applied Physics. 48:091204
We found a new filtering effect of hydrogen (H) and deuterium (D) isotope atoms for penetration process into crystal silicon (Si) through the interface between a Si and SiO2 native oxide layer. More H atoms are introduced into Si than D for mixing ga