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pro vyhledávání: '"Harris J. Keston"'
Autor:
Robin C. Sarma, Harris J. Keston, Shiany Oemardani, Santosh Shah, Toshiyuki Nagata, Narain D. Arora, Michael P. Duane, Michael C. Smayling
Publikováno v:
SPIE Proceedings.
The X Architecture is a new way of orienting the interconnect on an integrated circuit using diagonal pathways, as well as the traditional right-angle, or Manhattan, configuration. By enabling designs with significantly less wire and fewer vias, the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::afbe5a40ff9920a7088fbec4ea93ef85
https://doi.org/10.1117/12.536130
https://doi.org/10.1117/12.536130
Publikováno v:
SPIE Proceedings.
An attempt is made to characterize the submicron litho process under confocal laser scanning microscope metrology, using `linearity' and `discrimination' as process control parameters. This was found to allow for a more detailed process characterizat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aafdcc7e6a3bd95b69979b2f45fe7f8c
https://doi.org/10.1117/12.59781
https://doi.org/10.1117/12.59781
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