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Publikováno v:
Journal of Photopolymer Science and Technology. 15:493-496
Carbon-based materials were patterned by electron-beam lithography for applications in micro-total analysis systems. A heat-depolymerizable polycarbonate (HDP) layer on silicon was demonstrated as a sacrificial layer for forming microfluidic channels
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::18e6121413ad1742f77fb523aa783fa6
https://doi.org/10.2494/photopolymer.15.493
https://doi.org/10.2494/photopolymer.15.493
