Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Harlan Sur"'
Publikováno v:
EDFA Technical Articles. 1:19-30
Passive voltage contrast (PVC) has traditionally been used by semiconductor engineers for end-of-line post-mortem analysis. PVC distinguishes between open and short structures and is both nondestructive and noncontact. When applied during process dev
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0636715332733dec5e3c023f3e9bebde
https://doi.org/10.31399/asm.edfa.1999-3.p019
https://doi.org/10.31399/asm.edfa.1999-3.p019
Autor:
Hunter B. Brugge, Martin P. Karnett, Vijaya Subramaniam, Steven G. Qian, Todd Mitchell, Harlan Sur, Bradley J. Haby
Publikováno v:
SPIE Proceedings.
Bitmap and electrical microprobe techniques were employed to detect and isolate NMOS gate depletion within the SRAM cells of our 0.20micrometers Complementary Poly CMOS process. This gate depletion problem led to a 3X drop-off in device drive current
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2f07c5e5dd4845adcc9b92002056425a
https://doi.org/10.1117/12.395729
https://doi.org/10.1117/12.395729
Publikováno v:
SPIE Proceedings.
This paper describes some of the methodologies employed to achieve rapid yield learning on 0.25 micrometer, three-layer metal CMOS process. This includes: (1) design of a manufacturing-representative process qualification vehicle which readily lends
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a133bb6d2b55045b293a43ec0d3683a
https://doi.org/10.1117/12.361344
https://doi.org/10.1117/12.361344