Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Harish M. Manohara"'
Publikováno v:
Microsystem Technologies. 4:2-6
The X-ray micromachining activities at CAMD are described. Through the HI-MEMS Alliance Program, CAMD has developed an extensive technical infrastructure and process experience. The “X-ray Print-Shop” supports prototyping and is prepared for cost
Publikováno v:
Microsystem Technologies. 4:17-20
Commercial application of the “direct” LIGA process requires solving two critical issues: throughput and price. Stacking of PMMA sheets bonded to substrates and exposed simultaneously with hard X-ray has been suggested recently. This paper presen
Autor:
Harish M. Manohara, Gina M. Calderon, Yuli Vladimirsky, Kevin J. Morris, J. M. Klopf, Olga Vladimirsky
Publikováno v:
IEEJ Transactions on Electronics, Information and Systems. 116:1323-1333
Autor:
Babak, Kateb, Vicky, Yamamoto, Darya, Alizadeh, Leying, Zhang, Harish M, Manohara, Michael J, Bronikowski, Behnam, Badie
Publikováno v:
Methods in molecular biology (Clifton, N.J.). 651
Nanomedicine is a growing field with a great potential for introducing new generation of targeted and personalized drug. Amongst new generation of nano-vectors are carbon nanotubes (CNTs), which can be produced as single or multi-walled. Multi-walled
Autor:
M. L. Williams, Harish M. Manohara
Publikováno v:
Nuclear Science and Engineering. 111:345-367
Contributons are the special particles distributed among a general population that generate the response observed on a specified detector. Contributon slowing-down theory describes the transfer of ...
Publikováno v:
SPIE Proceedings.
A novel device to directly integrate mechanical motion with electronics on a chip for system integration is designed and fabricated. The device is a laterally movable gate field effect transistor. Here the gate moves parallel to the substrate surface
Publikováno v:
SPIE Proceedings.
In thick photoresist applications, commercially available acrylic sheets are bonded to a substrate as an alternative to the casting and in-situ polymerization of PMMA. The factors affecting the adhesion of a thick acrylic sheet to different substrate
Publikováno v:
Journal of synchrotron radiation. 5(Pt 3)
An additional X-ray lithography facility is under construction at the Center for Advanced Microstructures and Devices. It will receive radiation from a 7.5 T superconducting three-pole wavelength shifter. The critical energy of the insertion device i
Autor:
Jason Babin, Olga Vladimirsky, Gina M. Calderon, J. Michael Klopf, Kevin J. Morris, Harish M. Manohara, Yuli Vladimirsky
Publikováno v:
SPIE Proceedings.
An exposure radiation power measurement technique utilizing thin gold film thermal sensors has been presented. The sensory system of the power meter (or calorimeter) consists of three interlaced serpentine resistors covering an area of 6 cm by 0.4 cm
Autor:
Gina M. Calderon, Olga Vladimirsky, Harish M. Manohara, J. Michael Klopf, Kevin J. Morris, Yuli Vladimirsky
Publikováno v:
Microlithography and Metrology in Micromachining II.
Temperature measurements of thick PMMA resist during X-ray (1 to 5 keV) exposure are presented in this paper. Thin metal (gold) film thermal sensors were fabricated directly on the resist surface and on the resist/substrate interface using micro-lith