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Autor:
Jialiang Yan, Khalil Najafi, Rebecca L. Peterson, Jae Yoong Cho, Harald W. Eberhart, J. A. Gregory
Publikováno v:
Journal of Microelectromechanical Systems. 22:1276-1284
This paper presents a new and simple microfabrication process for creating various 3-D microstructures with high-aspect ratios . The key feature of this process is the use of a blow torch, which provides very intense localized heat for a short amount
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::38b0d875d3a359067b05a00a541be1ab
https://doi.org/10.1109/jmems.2013.2279165
https://doi.org/10.1109/jmems.2013.2279165
