Zobrazeno 1 - 10
of 164
pro vyhledávání: '"Harald SCHENK"'
Autor:
Jorge Mario MONSALVE GUARACAO, Sergiu LANGA, Michael STOLZ, Andreas MROSK, Bert KAISER, Harald SCHENK
Publikováno v:
Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol 18, Iss 2, Pp JAMDSM0018-JAMDSM0018 (2024)
Variability in the features produced by microfabrication processes, as well as uncertainty in some material properties, may cause a significant deviation in the performance of micromachines within the same fabrication run. Based on an estimation of t
Externí odkaz:
https://doaj.org/article/036b842782be464299602607a8849c4c
Autor:
Bert Kaiser, Hermann A. G. Schenk, Lutz Ehrig, Franziska Wall, Jorge M. Monsalve, Sergiu Langa, Michael Stolz, Anton Melnikov, Holger Conrad, David Schuffenhauer, Harald Schenk
Publikováno v:
Microsystems & Nanoengineering, Vol 8, Iss 1, Pp 1-14 (2022)
Abstract Electrostatic actuators are of particular interest for microsystems (MEMS), and in particular for MEMS audio transducers for use in advanced true wireless applications. They are attractive because of their typically low electrical capacitanc
Externí odkaz:
https://doaj.org/article/f37d2856e1d94324b9f7d21fd9f36bf6
Publikováno v:
Micromachines, Vol 12, Iss 5, p 483 (2021)
The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the dee
Externí odkaz:
https://doaj.org/article/83243d1d93a943ffbe73dacd5c29b90f
Publikováno v:
Sensors & Transducers, Vol 108, Iss 9, Pp 31-39 (2009)
A simple yet precise optical characterization technique for beam scanning devices is proposed. The method uses a single photodetector to measure various dynamic characteristics of scanning devices, including frequency, scan angle, scan phase, and the
Externí odkaz:
https://doaj.org/article/361bc7b571574d1fbca75e59fcc5e84c
Autor:
Jorge M. Monsalve, Lutz Ehrig, Harald Schenk, Bert Kaiser, Holger Conrad, Michael Stolz, David Schuffenhauer, H. Schenk, Anton Melnikov
Publikováno v:
IEEE/ASME Transactions on Mechatronics. 27:2612-2622
This article presents a circuit model that is able to capture the full nonlinear behavior of an asymmetric electrostatic transducer whose dynamics are governed by a single degree of freedom. Effects such as stress-stiffening and pull-in are accounted
For electrostatic actuators the pull-in marks an upper limit for the operation range. Once reached the electrodes come into contact and are shorted without further protection. A non-destructive measurement technique to predict this failure mode is of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fb449fcaf589b92f4d97dcad7126d544
https://doi.org/10.21203/rs.3.rs-2705506/v1
https://doi.org/10.21203/rs.3.rs-2705506/v1
Publikováno v:
Journal of Optical Microsystems. 2
Additive manufacturing using two-photon polymerization (TPP) lithography is increasingly used in industry and research. Parameter sweeps of cuboid structures fabricated using TPP lithography were investigated across the parameters of the laser power
Autor:
Jorge M. Monsalve, Anton Melnikov, Michael Stolz, Andreas Mrosk, Marcel Jongmanns, Franziska Wall, Sergiu Langa, Ioana Marica-Bercu, Tim Brändel, Marco Kircher, Hermann A.G. Schenk, Bert Kaiser, Harald Schenk
Publikováno v:
Sensors and Actuators A: Physical. 345:113813
Publikováno v:
2021 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD).
Optical interconnections are a promising step for-ward to overcome the intrinsic limitations of electrical inter-connections in integrated circuits. In this work, we present a finite element method (FEM) simulation study of a dielectric waveguide etc
Publikováno v:
2021 44th International Spring Seminar on Electronics Technology (ISSE).
Structuring polymers on micro-electro-mechanical-systems (MEMS) for the manufacturing of acoustical and optical metamaterials using the two-photon polymerization process depends on reliable and controllable regulation of the intensity. Reflecting sur