Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Harald Herchen"'
Publikováno v:
Thin Solid Films. 212:206-215
The polarization discriminated first-order Raman spectrum in homoepitaxial chemical vapor deposited diamond was measured for the temperature range 300–1200 K. The dependences of Raman shift and width on temperature for natural type IIa diamond over
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8d876c772a65d26a7759e8d085783a4a
https://doi.org/10.1016/0040-6090(92)90522-d
https://doi.org/10.1016/0040-6090(92)90522-d
Autor:
Harald Herchen, Hiram Cervera, Timothy Michaelson, Kim Vellore, Lu Chen, Nikolaos Bekiaris, Brian Lue, Junyan Dai
Publikováno v:
Advances in Resist Materials and Processing Technology XXV.
This paper investigates the feasibility of using an electrostatic chuck (ESC) on a post exposure bake (PEB) plate in the track to improve the critical dimension uniformity (CDU) for bowed wafers. Although it is more conventional to consider vacuum ch
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f75959db2fd4b184953e698a1c123e32
https://doi.org/10.1117/12.772894
https://doi.org/10.1117/12.772894
Autor:
Mark A. Cappelli, Harald Herchen
Publikováno v:
Physical review. B, Condensed matter. 49(5)
Polarization-resolved second-order Raman spectra of type-IIa natural diamond for the temperature range 300--1900 K are presented. They are compared with similar measurements made on chemical-vapor-deposition-produced diamond. The high-temperature beh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6cc284af519d9e19029c3c7e65869c57
https://pubmed.ncbi.nlm.nih.gov/10011180
https://pubmed.ncbi.nlm.nih.gov/10011180
Autor:
Mark A. Cappelli, Harald Herchen
Publikováno v:
Physical review. B, Condensed matter. 47(21)
The first-order Raman spectra of single-crystal cubic boron nitride for the range of 300 to 1830 K are presented. The Stokes and anti-Stokes components of both the TO (Γ) and the LO (Γ) modes are analyzed for their Raman shift and width variation w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1f2d96242514da1e143abceb7e12e9be
https://pubmed.ncbi.nlm.nih.gov/10005762
https://pubmed.ncbi.nlm.nih.gov/10005762
Autor:
Mark A. Cappelli, Harald Herchen
Publikováno v:
SPIE Proceedings.
Measurements of the first-order Raman spectrum in homoepitaxially grown synthetic diamond for the temperature range of 300 to 1200 K are presented. Similar measurements for natural type IIa diamond for the temperature range of 300 to 2000 K are also
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4053a78d1a62856dc6cc3819c9829007
https://doi.org/10.1117/12.48288
https://doi.org/10.1117/12.48288
Autor:
Mark A. Cappelli, Harald Herchen
Publikováno v:
Physical review. B, Condensed matter. 43(14)
Measurements of the first-order Raman spectrum in natural type-IIa diamond for the temperature range of 293 to 1850 K are presented. Both the Stokes and anti-Stokes components are analyzed for their intensity, Raman shift, and width variation with te
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0b78c1db42d37a229e4461bd08764eb6
https://pubmed.ncbi.nlm.nih.gov/9996945
https://pubmed.ncbi.nlm.nih.gov/9996945
Publikováno v:
Review of Scientific Instruments. 56:2030-2037
In a heat sandwich oven the metal vapor is confined to be disk shaped and is optically accessible through 360° in the plane of the disk. We have used this feature to optically measure the radial atom density distribution of sodium vapor within this
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dbb30166098c4a792641c795eca3001b
https://doi.org/10.1063/1.1138413
https://doi.org/10.1063/1.1138413
Autor:
Merry, W.
Publikováno v:
IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference & Workshop Theme-Innovative Approaches to Growth in the Semiconductor Industry ASMC 96 Proceedings; 1996, p314-316, 3p