Zobrazeno 1 - 10
of 35
pro vyhledávání: '"Hanyou Chu"'
Autor:
Yia-Chung Chang, Hanyou Chu
Publikováno v:
Physical Review B. 54:5020-5028
We present theoretical calculations of optical absorption-gain spectra for condensed excitons in both three dimensional (3D), 2D, and quasi-2D systems (appropriate for semiconductor quantum wells) as functions of the electron-hole pair density and te
Publikováno v:
Physical Review B. 47:1489-1499
We have performed theoretical studies on Raman scattering of GaAs-AlAs superlattices. Both effects of superlattice phonons and electronic structures are included in our calculation. For phonons in superlattices, we used a rigid-ion model that takes i
Autor:
Hanyou Chu
Publikováno v:
Solid State Communications. 80:1003-1007
The ground state of the Hubbard model in a square lattice is examined in the Hartree-Fock mean field approximation at zero temperature. At small finite hole doping, the system has periodically distributed soliton like structures whose modulations are
Publikováno v:
Superlattices and Microstructures. 9:383-389
We present theoretical studies of phonon modes in semiconductor superlattices in a rigid-ion model. We examine the dispersion curves for phonons propagating in any directions, taking into account the long-range Coulomb interaction. We introduce an al
Autor:
E. W. Fenton, Hanyou Chu
Publikováno v:
Phase Transitions. 28:27-31
In the electron-electron interaction the r-space structure caused by magnetic fluctuations at the phase transition from a nonmagnetic metal to an antiferromagnetic metal gives rise to a d-wave attractive interaction for Cooper pairing. This is a cont
Publikováno v:
SPIE Proceedings.
Spectra of contact hole arrays with target diameters ranging from 106 to 131 nm and pattern pitch ranging from 220 to 300 nm are taken from an off-axis (65°) rotating compensator spectroscopic ellipsometry (RCSE).[1] 3-dimensional finite difference
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XVIII.
In real-time optical CD applications of shallow trench isolation (STI), shallow trench removal (STR), deep trench isolation (DTI), and deep trench removal (DTR), a single recipe is required for each type of application to accommodate wide ranges of p
Autor:
Hanyou Chu, Youxian Wen, Osman Sorkhabi, Xuelong Cao, Guangwei Li, Yia-Chung Chang, Jon Opsal, Zhiming Jiang
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XVIII.
This paper presents measurement results of 3-D contact hole profiles using RT/CD ® technology for various diameter-to-space (D/S) ratios and film stacks. The key controlling parameters (hole depth, diameter, sidewall angle, and hole openness, etc.)
Autor:
Hanyou Chu
Publikováno v:
SPIE Proceedings.
Fast and efficient finite difference scheme in the vertical direction for optical scattering of gratings is presented. A second order central difference with boundary corrections or a pseudo fourth order operator splitting method is used. A stable re
Publikováno v:
SPIE Proceedings.
We have developed fast numerical solutions to the diffraction of light from a periodic array of contact holes (CH) in microelectronic structures. We present results for contact holes in oxide and in 193 nm and 248 nm photoresists. We also show detect