Zobrazeno 1 - 4 of 4 pro vyhledávání: '"Hansin Bae"'
1
Enhancement of the ion flux to the substrate through high-voltage biasing in an electron cyclotron resonance plasma and its application to high-speed deposition of conductive carbon film
Autor: Haruka Suzuki, Hirotaka Toyoda, Kensuke Sasai, Hansin Bae, Ikumi Hamaguchi
Publikováno v: Japanese Journal of Applied Physics. 60:126002
A method for enhancing ion flux to the substrate via high-voltage pulse biasing is investigated in an electron cyclotron resonance plasma. When high-voltage pulse biases above 500 V are applied to the stage, an increase in the stage current is observ
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::901d2fda706f278d1f176b4a1497331c
https://doi.org/10.35848/1347-4065/ac32b6
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2
High-speed deposition of graphite-like carbon film by Ar/C6H6 surface-wave plasma with high-voltage pulse biasing
Autor: Kensuke Sasai, Haruka Suzuki, Hansin Bae, Hirotaka Toyoda
Publikováno v: Vacuum. 192:110429
A method for graphite-like carbon (GLC) deposition using Ar/C6H6 surface-wave plasma (SWP) is proposed. Characteristic of the SWP, i.e., high plasma density with wide spatial uniformity realized uniform carbon film deposition at high deposition rates
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5bd541112a3bd4aae1183c8edd5adfed
https://nagoya.repo.nii.ac.jp/records/2002045
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