Zobrazeno 1 - 1
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pro vyhledávání: '"Hans-Juergen Feige"'
Publikováno v:
Materials Today: Proceedings. 3:1205-1210
Polymer MEMS and micro components offer new smart functionalities and innovative applications in addition to silicon. Parallel to the development of technology or new materials, there exists the demand on material characterization to ensure reliabili
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::75861c821c821d8b0b906dcd963381f4
https://doi.org/10.1016/j.matpr.2016.03.005
https://doi.org/10.1016/j.matpr.2016.03.005
