Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Hani C. Gomez"'
Publikováno v:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers).
We present the first-ever successful jumps of a microrobot fabricated in a silicon-on-insulator (SOI) process with an energy storing spring etched into the silicon substrate. The 0.08 gram silicon robot used its onboard electrostatic inchworm motor t
Publikováno v:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers).
We report robust microfabricated MEMS electrostatic inchworm motors moving macroscopic objects: a motor in a $14.5\times 9.5\times 1.2\text{mm}$ gripper with 3mm displacement and 15mN force lifting a 1g weight, and an identical motor moving a 100mm l
Autor:
Andrew Fearing, Daniel Teal, Hani C. Gomez, Jason T. Stauth, Kristofer S. J. Pister, Jan S. Rentmeister, Alex Moreno, Austin Patel
Publikováno v:
ICRA
Solar-powered actuation of a 15 mN electrostatic MEMS gripper was demonstrated while wirelessly triggered by IEEE 802.15.4 RF signals. The solar-powered gripper was shown to actuate at a rate of 640 um/s. The complete system is composed of three capa
Autor:
Dillon Acker-James, Wei Li, Hani C. Gomez, Daniel Teal, Kristofer S. J. Pister, Craig B. Schindler
Publikováno v:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
We demonstrate a MEMS gripper with a measured 15mN of gripping force over the full gripping displacement of 0 to 1 mm. Integrated contact and capacitive force sensing have been demonstrated and characterized. The gripper has successfully held and rel
A Jumping Silicon Microrobot with Electrostatic Inchworm Motors and Energy Storing Substrate Springs
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
We present the first demonstration of a silicon microrobot using electrostatic inchworm motors to store mechanical energy in springs etched into the silicon substrate. The microrobot is fabricated using a two mask silicon on insulator MEMS process wi
Autor:
Hani C. Gomez, Craig B. Schindler, Harry L. Clark, Kristofer S. J. Pister, Joseph T. Greenspun
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
This paper presents an innovative approach for 3D multi-chip assembly using a zero insertion force (ZIF) MEMS socket, which was designed, fabricated and tested. We demonstrate: 1) 3D assembly between a ZIF socket and a linear MEMS motor, 2) 3D assemb
Autor:
Joseph T. Greenspun, E. Liu, Daniel S. Contreras, Brian G. Kilberg, Hani C. Gomez, Kristofer S. J. Pister
Publikováno v:
2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest.