Výsledky vyhledávání - "Han-Mil Kim"

A Study of a Single-Wafer Process in Metal Contact Hole Cleaning

Autor: Leo Archer, Tae-gyun Kim, Eun Su Rho, Han Mil Kim, Bong Ho Moon, Hee Kang Cho, Won Ho Cho, Jae Yong Park, Jong Kook Song

Publikováno v: Solid State Phenomena. 134:177-180

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::beed141eda9223cffc827d73f86454c7
https://doi.org/10.4028/www.scientific.net/ssp.134.177

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A Study of a Single-Wafer Process in Metal Contact Hole Cleaning

Autor: Jae Yong Park, Jong Kook Song, Han Mil Kim, Hee Kang Cho, Tae Gyun Kim, Bong Ho Moon, Eun Su Rho, Leo Archer, Won Ho Cho

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::84d7b68fa2ff9631f5bd16b9d04c4759
https://doi.org/10.4028/3-908451-46-9.177

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Benefits of Single-Wafer Polymer Removal with Inorganic Chemicals on FEOL and BEOL Structures of DRAMs

Autor: Sally-Ann Henry, Christian Haigermoser, Enzo Rho, Jong-Kook Song, Han-Mil Kim

Publikováno v: ECS Meeting Abstracts. :774-774

not Available.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ca0ffdca4abbd9c5758a9af2445ebb48
https://doi.org/10.1149/ma2005-02/20/774

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Akademický článek

Single-wafer polymer removal on DRAM structures using inorganic chemicals.

Autor: Jong-Kook Song, Han-Mil Kim, Eun-Su Rho, Haigermoser, Christian, Henry, Sally-Ann

Publikováno v: Solid State Technology. May2005, Vol. 48 Issue 5, p36-40. 4p.

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