Výsledky vyhledávání - "Hamasaki, Ryoji"

Akademický článek

Near-surface interactions and their etching-reaction model in metal plasma-assisted etching.

Autor: Tachi, Shinichi, Izawa, Masaru, Tsujimoto, Kazunori, Kure, Tokuo, Kofuji, Naoyuki, Suzuki, Keizo, Hamasaki, Ryoji, Kojima, Masayuki

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1998, Vol. 16 Issue 1, p250-259, 10p

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Akademický článek

Model prediction of radical composition in plasmas and correlation with measured etch characteristics of silicon dioxide.

Autor: Kazumi, Hideyuki, Hamasaki, Ryoji, Tago, Kazutami

Publikováno v: Plasma Sources Science & Technology; May1996, Vol. 5 Issue 2, p1-1, 1p

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Periodical

Mechanism for CF Polymer Film Deposition through Deep SiO2Holes in Electron Cyclotron Resonance Plasma

Autor: Ono, Tetsuo, Hamasaki, Ryoji, Mizutani, Tatsumi

Publikováno v: Japanese Journal of Applied Physics; April 1996, Vol. 35 Issue: 4 p2468-2468, 1p

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Periodical

Radical and Ion Compositions of BCl3/Cl2Plasma and Their Relation to Aluminum Etch Characteristics

Autor: Kazumi, Hideyuki, Hamasaki, Ryoji, Kazutami Tago, Kazutami Tago

Publikováno v: Japanese Journal of Applied Physics; July 1997, Vol. 36 Issue: 7 p4829-4829, 1p

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Periodical

Mechanism of CF Polymer Film Deposition through High-Aspect-Ratio SiO2Holes

Autor: Ono, Tetsuo, Hamasaki, Ryoji, Tatsumi Mizutani, Tatsumi Mizutani

Publikováno v: Japanese Journal of Applied Physics; December 1994, Vol. 33 Issue: 12 pL1717-L1717, 1p

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