Zobrazeno 1 - 10
of 60
pro vyhledávání: '"Haiyong Gao"'
Publikováno v:
Journal of Materials Chemistry A. 8:10845-10854
Amongst various gaseous pollutants, NO2 is one of the major exhausts originating from fossil fuel and gas combustions in vehicle engines and power plants at high temperature. Under such a scenario, in situ and real-time gas detection and monitoring s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1af9bc25edaa9c9d5200541ce167e338
https://doi.org/10.1039/d0ta02691c
https://doi.org/10.1039/d0ta02691c
Autor:
Woong Jae Chung, Blandine Minghetti, Rajan Mali, Gregory Hart, Pavan Samudrala, Nyan Aung, Lokesh Subramany, Haiyong Gao, Seva Khikhlovskyi, Pieter Heres, Yen-Jen Chen
Publikováno v:
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Wafers at FBEOL layers traditionally have higher stress and larger alignment signal variability. ASML's ATHENA sensor based scanners, commonly used to expose FBEOL layers, have large spot size (∼700um). Hence ATHENA captures the signal from larger
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3c38a81b2ec54b9497c883479b762ec3
https://doi.org/10.1109/asmc.2018.8373194
https://doi.org/10.1109/asmc.2018.8373194
Autor:
Juan Manuel Gomez, Woong Jae Chung, Kevin Jock, Haiyong Gao, Yen-Jen Chen, Bono Park, Ian Krumanocker, Nyan Aung, Yue Zhou, Guanchen He, Pavan Samudrala, Xueli Hao, Karsten Gutjahr, Darius Brown, Wenle Gao, Michael Hsieh, DeNeil Park
Publikováno v:
Optical Microlithography XXXI.
We demonstrate high volume manufacturing feasibility of 7 nm technology overlay correction requirement. This stateof- the-art overlay control is achieved by (i) overlay sampling optimization and advanced modeling, (ii) alignment and advanced process
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::69b11410bbe82ca45a0dce064af50094
https://doi.org/10.1117/12.2295828
https://doi.org/10.1117/12.2295828
Autor:
Pavan Samudrala, Shawn Lee, Blandine Minghetti, Lokesh Subramany, Delvigne Erik Henri Adriaan, Woong Jae Chung, Haiyong Gao, Seung Chul Oh, Nyan Aung
Publikováno v:
SPIE Proceedings.
With continuous shrink in feature dimensions, overlay tolerance for fabrication of transistors is getting more stringent. Achieving good overlay is extremely critical in getting good yield in HVM environment. It is widely understood that good alignme
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a80eea559af05532ded32ad66c4086d8
https://doi.org/10.1117/12.2258137
https://doi.org/10.1117/12.2258137
Autor:
Nyan Aung, Pavan Samudrala, Gregory Hart, Woong Jae Chung, Blandine Minghetti, Haiyong Gao, Seva Khikhlovskyi, Yen-Jen Chen, Rajan Mali, Lokesh Subramany, Pieter Heres
Publikováno v:
SPIE Proceedings.
Wafers at FBEOL layers traditionally have higher stress and larger alignment signal variability. ASML’s ATHENA sensor based scanners, commonly used to expose FBEOL layers, have large spot size (~700um). Hence ATHENA captures the signal from larger
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ec6351baa873c6a59be4d740fe50e4a3
https://doi.org/10.1117/12.2258128
https://doi.org/10.1117/12.2258128
Publikováno v:
Applied Surface Science. 296:53-60
A variety of stannate nanostructures have been fabricated for UV photocatalysis, including zinc- and cadmium-based stannates. As the template nanostructures, high surface-area mesoporous metal hydroxystannate [ZnSn(OH) 6 and CdSn(OH) 6 ] nanoparticle
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::52b601a9e25fea8f58b4ef1b12c9ef9c
https://doi.org/10.1016/j.apsusc.2014.01.030
https://doi.org/10.1016/j.apsusc.2014.01.030
Autor:
Hom N. Sharma, Wen Xiao, Yanbing Guo, Zheng Ren, Caihong Liu, Pu-Xian Gao, Haiyong Gao, A.B. Mhadeshwar
Publikováno v:
Nano Energy. 2:873-881
Constructed with parallel or honeycomb channels micrometer to millimeter in diameter, monolithic catalysts and reactors have been utilized in various business sectors ranging from mechanical, automotive, fine chemicals, pharmaceutical, to biotechnolo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c120a3ebff4e204b69731f8d0af023cc
https://doi.org/10.1016/j.nanoen.2013.03.004
https://doi.org/10.1016/j.nanoen.2013.03.004
Autor:
Nyan Aung, Pavan Samudrala, Haiyong Gao, Blandine Minghetti, Woong Jae Chung, Lokesh Subramany, Shawn Lee, Juan Manuel Gomez
Publikováno v:
SPIE Proceedings.
To further shrink the contact and trench dimensions, Negative Tone Development (NTD) has become the de facto process at these layers. The NTD process uses a positive tone resist and an organic solvent-based negative tone developer which leads to impr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::60844d2d10c114d88e7e83472b17db54
https://doi.org/10.1117/12.2218724
https://doi.org/10.1117/12.2218724
Autor:
Yong Ding, Chang-Yong Nam, Hui Jan Lin, Pu-Xian Gao, John P. Baltrus, Paul R. Ohodnicki, Haiyong Gao
Publikováno v:
ACS applied materialsinterfaces. 8(14)
Noble metal nanoparticles are extensively used for sensitizing metal oxide chemical sensors through the catalytic spillover mechanism. However, due to earth-scarcity and high cost of noble metals, finding replacements presents a great economic benefi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::df4e768aa50fe3778b03f5f2875a4aeb
https://pubmed.ncbi.nlm.nih.gov/27043430
https://pubmed.ncbi.nlm.nih.gov/27043430
Autor:
Bill Pierson, Woong Jae Chung, Lipkong Yap, Dongsuk Park, Patrick Snow, Juan Manuel Gomez, Nyan Aung, John C. Robinson, Lokesh Subramany, Karsten Gutjahr, Onur N. Demirer, Haiyong Gao, Pavan Samudrala, Miguel Garcia-Medina
Publikováno v:
SPIE Proceedings.
In recent years overlay (OVL) control schemes have become more complicated in order to meet the ever shrinking margins of advanced technology nodes. As a result, this brings up new challenges to be addressed for effective run-to- run OVL control. Thi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8fe27fdc3e700c3c5703cf8b8148d601
https://doi.org/10.1117/12.2218729
https://doi.org/10.1117/12.2218729