Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Haerim, Oh"'
Groundwater, one of the environmental tools to achieve carbon neutrality, can be a sustainable thermal resource for a geothermal system. This study aims to investigate the groundwater system characteristics related to the thermal use of groundwater f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::24081ed64e3bde5959fbae33e1e3705b
https://doi.org/10.5194/egusphere-egu23-10285
https://doi.org/10.5194/egusphere-egu23-10285
Publikováno v:
Solid State Phenomena. 314:209-213
A study for uniform deposition on whole area of wafer was conducted to help check the uniformity of cleaning technology between wafer center to edge. A new method of particle deposition was devised different from the conventional studies using the ce
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1bc342e537d4d8ee96618bb3aa920afe
https://doi.org/10.4028/www.scientific.net/ssp.314.209
https://doi.org/10.4028/www.scientific.net/ssp.314.209
Publikováno v:
Goldschmidt2022 abstracts.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::86a552ccaef76943ad90544206771dbe
https://doi.org/10.46427/gold2022.9536
https://doi.org/10.46427/gold2022.9536
Publikováno v:
The Review of scientific instruments. 92(11)
A study of the uniform deposition of nanoparticles across a 300-mm wafer was conducted to assess the uniformity of the wafer center-to-edge cleaning technique. A new method of particle deposition was devised different from the conventional method usi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::0e5fe8c848b7c336e12cce5d8f7b590d
https://pubmed.ncbi.nlm.nih.gov/34852556
https://pubmed.ncbi.nlm.nih.gov/34852556
Publikováno v:
Review of Scientific Instruments. 92:113704
A study of the uniform deposition of nanoparticles across a 300-mm wafer was conducted to assess the uniformity of the wafer center-to-edge cleaning technique. A new method of particle deposition was devised different from the conventional method usi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4f093a11b981c02cd868d41c61806008
https://doi.org/10.1063/5.0067262
https://doi.org/10.1063/5.0067262