Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Hae-Mi Jeong"'
Autor:
Eui-Hyun Ryu, Kwang-Hwyi Im, Hae-Mi Jeong, Hyungjun Kim, Myung-Yeol Kim, Hankyul Lee, You-Jung Yoon, Hyun K. Jeon
Publikováno v:
Journal of Photopolymer Science and Technology. 29:731-736
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e23b592797538f47cabf5f56b5939335
https://doi.org/10.2494/photopolymer.29.731
https://doi.org/10.2494/photopolymer.29.731
Autor:
Kevin Rowell, Mingqi Li, Kwang-Hwyi Im, Charlotte Cutler, Cong Liu, Patricia Fallon, Tom Estelle, Hae-Mi Jeong, Gerd Pohlers, Lori Anne Joesten, Irvinder Kaur, Peter Trefonas, Hyun K. Jeon, Wanyi Huang, Paul Baranowski, Wenyan Yin, Cheng Bai Xu, JoAnne Leonard
Publikováno v:
SPIE Proceedings.
As the critical dimension of devices is approaching the resolution limit of 193nm photo lithography, multiple patterning processes have been developed to print smaller CD and pitch. Multiple patterning and other advanced lithographic processes often
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e1e6057a784a9ed8cf05ce3d6e182d87
https://doi.org/10.1117/12.2219688
https://doi.org/10.1117/12.2219688