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Autor:
Mäkelä, Tapio, Haatainen, Tomi
Publikováno v:
In Microelectronic Engineering September 2012 97:89-91
Publikováno v:
In Microelectronic Engineering August 2011 88(8):2045-2047
Autor:
Schleunitz, Arne, Spreu, Christian, Mäkelä, Tapio, Haatainen, Tomi, Klukowska, Anna, Schift, Helmut
Publikováno v:
In Microelectronic Engineering August 2011 88(8):2113-2116
Publikováno v:
In Microelectronic Engineering 2007 84(5):877-879
Publikováno v:
In Microelectronic Engineering 2006 83(4):948-950
Autor:
Haatainen, Tomi
Publikováno v:
Haatainen, T 2011, ' Stamp fabrication by step and stamp nanoimprinting : Dissertation ', Doctor Degree, Aalto University, Espoo . < https://publications.vtt.fi/pdf/publications/2011/P758.pdf >
The nanoimprinting is a potential method for submicron scale patterning for various applications, for example, electric, photonic and optical devices. The patterns are created by mechanical deformation of imprint resist using a patterned imprinting m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=355e65625b88::8292897d6b96975b684c16ffbae4cd18
https://cris.vtt.fi/en/publications/6d79efdc-d463-47f4-bc3b-a9599185238d
https://cris.vtt.fi/en/publications/6d79efdc-d463-47f4-bc3b-a9599185238d
Publikováno v:
Kolari, K, Haatainen, T, Ylinen, S & Aalto, T 2011, Nanoimprinting polyimide and polymer multilayers . in Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop . Vestfold University College, pp. 73-76, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19-22 June 2011, 1/01/11 .
This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=355e65625b88::786e224ea9ed795430d1d1fd23c6ebd9
https://cris.vtt.fi/en/publications/a50ce0e0-e411-4f06-96df-fd832b888832
https://cris.vtt.fi/en/publications/a50ce0e0-e411-4f06-96df-fd832b888832
Autor:
Atasoy, Hakan, Vogler, Marko, Haatainen, Tomi, Schleunitz, Arne, Schift, Helmut, Reuther, Freimut, Gruetzner, Gabi
Publikováno v:
Atasoy, H, Vogler, M, Haatainen, T, Schleunitz, A, Schift, H, Reuther, F & Gruetzner, G 2010, Reduction of the release forces of polymers for thermal nil and their quantification . in Conference Program and Proceedings : 9th International Conference NNT: Nanoimprint & Nanoprint Technology . pp. 100-101, 9th International Conference on Nanoimprint and Nanoprint Technology, NNT 2010, Copenhagen, Denmark, 13/10/10 . < https://issuu.com/oresund/docs/nnt2010 >
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=355e65625b88::e99d1cd834feb9ed335f67250795cb6f
https://cris.vtt.fi/en/publications/29362caf-307e-4ce6-97e2-81b6939ac022
https://cris.vtt.fi/en/publications/29362caf-307e-4ce6-97e2-81b6939ac022
Autor:
Reboud, V., Kehagias, N., Haatainen, Tomi, Landis, S., Putz, A., Casey, D., Nagle, L., Rohan, J. F., Ginige, R., Ahopelto, Jouni, Sotomayor Torres, C.M.
Publikováno v:
Reboud, V, Kehagias, N, Haatainen, T, Landis, S, Putz, A, Casey, D, Nagle, L, Rohan, J F, Ginige, R, Ahopelto, J & Sotomayor Torres, C M 2008, ' Fabrication strategies of interdigitated bimetallic electrodes for organic-optoelectronics applications ', Paper presented at 1st International Symposium on Flexible Organic Electronics, IS-FOE08, Halkidiki, Greece, 10/07/08-11/07/08 .
The absorption coefficient in organic polymers is known to be high ~107 m-1, thus requiring only a 100-300 nm thick film of polymer for complete absorption of visible light. However, the poor electron and hole lifetimes in organic polymers makes this
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=355e65625b88::1bb9bd7048baf17507bae603213044c8
https://cris.vtt.fi/en/publications/000c2cd9-9f1f-47b3-ab8a-1f1f4580de86
https://cris.vtt.fi/en/publications/000c2cd9-9f1f-47b3-ab8a-1f1f4580de86