Zobrazeno 1 - 10
of 89
pro vyhledávání: '"HAROLD F. WINTERS"'
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 25:96-103
The purpose of this article is to present evidence about the quantity and distribution of fluorine in silicon after and during spontaneous etching with F atoms, F2, and XeF2. X-ray photoelectron spectroscopy spectra were analyzed using the method dev
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cdb9638e8d2bdc2522ea4e52c5e4b592
https://doi.org/10.1116/1.2400680
https://doi.org/10.1116/1.2400680
Autor:
Alan C. Luntz, Harold F. Winters
Publikováno v:
The Journal of Chemical Physics. 101:10980-10989
The dissociative sticking S0 for CH4, C2H6, and their deuterated analogs has been measured on Pt(110) as a function of surface temperature Ts under thermal ‘‘bulb’’ conditions at low gas pressures (Tg=300 K). Large increases in S0 with Ts are
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1da2684e18aadec04dbc10e3dd58da91
https://doi.org/10.1063/1.467848
https://doi.org/10.1063/1.467848
Publikováno v:
Journal of Applied Physics. 76:1228-1243
Modulated‐beam mass spectrometry and x‐ray photoelectron spectroscopy (XPS) have been used to investigate the interaction of CH4, C2H4, C5H10, and H2 with carburized and uncarburized tungsten. It is shown that significant evaporation of C1, C2, a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca547b95e25ae68cfba516bbdc71bef6
https://doi.org/10.1063/1.357852
https://doi.org/10.1063/1.357852
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 11:657-663
It has been recognized since the 1960’s that bombardment of a growing thin film by energetic particles strongly influences film properties. Particle bombardment has generally been accomplished by accelerating ions into the growing film. However, it
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f9a0361354f6cf445690adc8c70a959c
https://doi.org/10.1116/1.578787
https://doi.org/10.1116/1.578787
Autor:
J. W. Coburn, Harold F. Winters
Publikováno v:
ChemInform. 23
Basic studies of the surface science aspects of plasma-assisted etching were initiated over 10 years ago in laboratories throughout the world. Several approaches to this experimentally challenging problem have been taken: (1) simulate the reactive ga
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::876628ddd5a39e1c71e92e080aeaa2ea
https://doi.org/10.1002/chin.199241261
https://doi.org/10.1002/chin.199241261
Autor:
Alan C. Luntz, Harold F. Winters
Publikováno v:
ChemInform. 26
The dissociative sticking S0 for CH4, C2H6, and their deuterated analogs has been measured on Pt(110) as a function of surface temperature Ts under thermal ‘‘bulb’’ conditions at low gas pressures (Tg=300 K). Large increases in S0 with Ts are
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b1cc30c47361c3d0821e1aa9f692c5fc
https://doi.org/10.1002/chin.199521036
https://doi.org/10.1002/chin.199521036
Publikováno v:
Applied Physics A Solids and Surfaces. 55:274-278
The energy transferred to a copper surface by bombardment with Xe+, Ar+, and He+ ions with kinetic energies in the range 100–4000 eV has been studied by our group in previous experiments. There were significant experimental uncertainties for that d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::516d799f0504bd725d840e055aea0a5f
https://doi.org/10.1007/bf00348397
https://doi.org/10.1007/bf00348397
Autor:
J. W. Coburn, Harold F. Winters
Publikováno v:
Surface Science Reports. 14:162-269
Basic studies of the surface science aspects of plasma-assisted etching were initiated over 10 years ago in laboratories throughout the world. Several approaches to this experimentally challenging problem have been taken: (1) simulate the reactive ga
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7ee3c49d18a1496fa96dbde28da3e905
https://doi.org/10.1016/0167-5729(92)90009-z
https://doi.org/10.1016/0167-5729(92)90009-z
Publikováno v:
Physical Review B. 44:4747-4758
The energy deposited into carbon, silicon, copper, silver, and gold surfaces by ${\mathrm{He}}^{+}$, ${\mathrm{Ar}}^{+}$, and ${\mathrm{Xe}}^{+}$ ions impinging with kinetic energy in the range 100--4000 eV has been measured. These studies employed a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d34bd5d868fd89989aff45fc160a37c1
https://doi.org/10.1103/physrevb.44.4747
https://doi.org/10.1103/physrevb.44.4747
Publikováno v:
MRS Proceedings. 235
It has been recognized since the 1960's that bombardment of a growing thin film by energetic particles strongly influences film properties. Particle bombardment has generally been accomplished by accelerating ions into the growing film. However, it h
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3f20efa0f0dc827f7b41d93e67f1480b
https://doi.org/10.1557/proc-235-735
https://doi.org/10.1557/proc-235-735