Zobrazeno 1 - 10
of 35
pro vyhledávání: '"H.-J. Timme"'
Autor:
H.‐J. Timme
Publikováno v:
CMOS - MEMS
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c2d2a697ce433162c0ee3440c3518451
https://doi.org/10.1002/9783527616718.ch6
https://doi.org/10.1002/9783527616718.ch6
Publikováno v:
Sensors and Actuators A: Physical. 92:312-317
This paper reports a new surface micromachined torsional actuator for integrated microswitches. The device requires an actuation voltage below 10 V and is fabricated in a BiCMOS compatible process, allowing for monolithic integration with an actuatio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66f606fe1d913f5a3f6d5dd5e047bd06
https://doi.org/10.1016/s0924-4247(01)00589-1
https://doi.org/10.1016/s0924-4247(01)00589-1
Publikováno v:
Sensors and Actuators A: Physical. 83:93-100
This paper presents an additive integration technology for fabrication of MEMS with an electroplating technology on top of a CMOS signal processing circuit. It reports on the development of an inertial sensor-array device for automotive applications
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fc07b10958e2feb34c3982e6a7b38e74
https://doi.org/10.1016/s0924-4247(00)00295-8
https://doi.org/10.1016/s0924-4247(00)00295-8
Autor:
M. Augustyniak, Marc Tiebout, Ralf Brederlow, Roland Thewes, Werner Simburger, H. Mulatz, B. Eversmann, Gottfried Beer, Lüder Elbrecht, W. Weber, Doris Schmitt-Landsiedel, Christian Paulus, H.-J. Timme
Publikováno v:
ISSCC
A 0.13μm CMOS chip is fabricated with eight resonator-amplifiers to demonstrate a highly integrated gravimetric sensor based on an FBAR oscillator. The oscillator is attached via flip-chip bonding to a CMOS resonator. Each active 1.86GHz oscillator
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eca142495b4c4748cc00202961fe9a10
https://doi.org/10.1109/isscc.2007.373459
https://doi.org/10.1109/isscc.2007.373459
Publikováno v:
Applied Physics Letters. 68:2843-2845
The maximum stress induced by high pressure oxidation (wet and dry) in the vertical bird’s beak of submicron trench structures has been investigated experimentally. The oxidation induced stress was measured via wafer bow on wafers that were pattern
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e408bbcd933b1dd1670d9c92325517d4
https://doi.org/10.1063/1.116343
https://doi.org/10.1063/1.116343
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 14:462-464
We have investigated the role of surface oxygen on the rapid thermal nitridation of Si(001) by NH3 using medium energy ion scattering. For short times, typical of rapid thermal processing, monolayer quantities of oxygen are sufficient to reduce nitri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::62b6faa48b0348b1668f7adcb12c355c
https://doi.org/10.1116/1.580106
https://doi.org/10.1116/1.580106
Publikováno v:
2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535).
The concepts and trends for the use of bulk acoustic wave (BAW) filters in tomorrow's highly integrated RF front end components in mobile communication devices are discussed. We present examples for the integration of BAW filters into low-cost lamina
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc29641ea5cbd1d8a581e4b01d8c9f33
https://doi.org/10.1109/mwsym.2004.1335905
https://doi.org/10.1109/mwsym.2004.1335905
Autor:
U. Bauernschmitt, Stephan Marksteiner, J. Portmann, Robert Aigner, H.-J. Timme, R. Welzer, M. Handtmann
Publikováno v:
IEEE Symposium on Ultrasonics, 2003.
The challenge for developing a duplexer for US-PCS mobile phones comes from the close proximity of TX and RX pass bands as well as from very stringent rejection and isolation requirements. Until recently, only rather bulky ceramic filters were able t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::777b5fcecfa71464b4e81609f9341014
https://doi.org/10.1109/ultsym.2003.1293261
https://doi.org/10.1109/ultsym.2003.1293261
Autor:
Christian Paulus, Arpad L. Scholtz, Ralf Brederlow, H. Heiss, S. Zauner, Lueder Elbrecht, Robert Aigner, Roland Thewes, Klaus Aufinger, Werner Simburger, H.-J. Timme, M. Fritz, A. Martin, Stephan Marksteiner
Publikováno v:
IEEE International Electron Devices Meeting 2003.
A new general purpose approach for a sensor based on a mass-weighting principle has been developed. This concept offers the advantage to replace a complex and expensive optical system by a low-cost electronic readout system. In contrast to all establ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ccd788612a1a7203378d5a9d671ebb1a
https://doi.org/10.1109/iedm.2003.1269447
https://doi.org/10.1109/iedm.2003.1269447
Publikováno v:
Digest. International Electron Devices Meeting.
RF-MEMS filters will substitute conventional filters in mobile communication under certain technical and commercial conditions. Key performance parameters and requirements are discussed in detail. Two different approaches for RF-MEMS filters are revi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c5e22641bf567689e73c3f8f5efb5f42
https://doi.org/10.1109/iedm.2002.1175981
https://doi.org/10.1109/iedm.2002.1175981